鐖嗙牬鐗�瑁濈疆閬╃敤浜庝笅鍒楀牬鍚堬細
宸ヤ綔浠嬭唱(zh矛)鍏锋湁绮樻€ф垨鏄撲簬绲�(ji茅)鏅�銆佽仛鍚堬紝瀹规槗灏囧畨鍏ㄩ枼闁ョ摚鑸囬枼搴х矘浣忔垨鍫靛瀹夊叏闁�锛�
鐢变簬鍖栧(xu茅)鍙嶆噳(y墨ng)鎴栧叾浠栧師鍥�锛屽櫒鍏�(n猫i)澹撳姏鍙灛闁撴€ュ妵涓婂崌锛岀敤瀹夊叏闁ョ敱浜庢叄鎬у奖闊夸笉鑳藉強鏅�(sh铆)闁嬪暉鍙婃硠鏀惧鍔�锛�
宸ヤ綔浠嬭唱(zh矛)鐐哄妵姣掓埃楂旀垨鏄傝泊姘ｉ珨锛岀敤瀹夊叏闁ラ洠鍏嶆硠婕忛€犳垚鐠�(hu谩n)澧冩薄鏌撴垨娴不(f猫i)锛�
姘ｉ珨鎺掓斁鍙ｅ皬浜�12nm鎴栧ぇ浜�150mm锛岃姹傚叏閲忔硠鏀炬垨鍏ㄩ噺娉勬斁鏅�(sh铆)瑕佹眰姣劇闃荤鐨勫牬鍚堬紱
鍏朵粬涓嶉仼鐢ㄥ畨鍏ㄩ枼鑰岄仼鐢�鐖嗙牬鐗�鐨勫牬鍚�銆�
鐖嗙牬鐗囦娇鐢ㄥ伐娉侊細
1锛屽鍔涘鍣ㄥ洜鍙嶆噳(y墨ng)澹撳姏鎬ュ妵鍗囬珮锛屾鏅�(sh铆)瀹夊叏闁ヤ締涓嶅強鎵撻枊锛岀垎鐮寸墖鐨勯珮闈堟晱搴﹁兘閬�(d谩)鍒板鍣ㄦ硠澹撶殑瑕佹眰銆�
2锛屽鍔涘鍣ㄤ腑浠嬭唱(zh矛)鏄撶祼(ji茅)鏅跺叿鏈� 瀹氱殑绮樺害锛屼娇鐢ㄥ畨鍏ㄩ枼瀹规槗鍫靛锛屽埌涓嶅埌娉勫鐨勮姹�锛屾鏅�(sh铆)鎳�(y墨ng)閬哥敤鐖嗙牬鐗囦綔鐐烘硠澹撹缃�銆�
3锛屽鍔涘鍣ㄤ腑浠嬭唱(zh矛)鐐烘槗鐕冩槗鐖嗘湁姣掍粙璩�(zh矛)鍜屽叿鏈夐珮鑵愯潟鎬�锛屾鏅�(sh铆)閬哥敤瀹夊叏闁ラ€犲児(ji脿)鎴愭湰楂�锛岃€屼笖闁ヨ姱鐨勬潗璩�(zh矛)鏈� 瀹氱殑瑕佹眰锛屽瘑灏佹€ц兘涔熶笉 瀹氳兘閬�(d谩)鍒拌姹�锛屾鏅�(sh铆)鎳�(y墨ng)閬告搰鐖嗙牬鐗�銆�
鐖嗙牬鐗囧畨鍏ㄦ硠澹撹缃�锛岀偤鍖栧伐瀹夊叏淇濋璀�(h霉)鑸紝婵�(j矛)鍗楀啝瓒婃(j墨)姊版湡寰呰垏鎮ㄧ殑鐪熻獱鍚堜綔銆�
鐖嗙牬鐗囧瀷铏�(h脿o)閬告搰鏅�(sh铆)鎳�(y墨ng)娉ㄦ剰鐨勪簨闋�(xi脿ng)锛�
1锛岀垎鐮寸墖鏉愭枡鐨勪娇鐢ㄦ韩搴�
2锛屽伐浣滀粙璩�(zh矛)灏嶆潗鏂欑殑鑵愯潟鎬�锛� 鑸彲浠ュ仛闃茶厫铏曠悊鍣存秱姘熷鏂欏堡鎴栧鍔犳盁濉戞枡淇濊(h霉)灞や綔鐐洪槻鑵愪繚璀�(h霉)鑶�
3锛岀垎鐮寸墖鑸囧畨鍏ㄩ枼涓茶伅(li谩n)鏅�(sh铆)鎳�(y墨ng)閬告搰鐖嗙牬鐗囨硠澹撳悗涓嶇敘(ch菐n)鐢熺鐗囩殑鍨嬭櫉(h脿o)銆�
鐖嗙牬鐗囪垏瀹夊叏闁ョ祫鍚堜娇鐢� 鑸槸鍦ㄨ姹傛瘮杓冨毚(y谩n)鏍肩殑姊濅欢涓嬩娇鐢紝鍠崹(d煤)浣跨敤瀹夊叏闁ヤ笉瀹夊叏锛屽鏄撶噧鏄撶垎鏈夋瘨鐨�锛岀垎鐮寸墖鍜屽畨鍏ㄩ枼绲勫悎浣跨敤鏃㈠彲浠ラ仈(d谩)鍒板瘑灏佹€�锛岀垎鐮寸墖鍕�(d貌ng)浣滃悗瀹夊叏闁ュ彲浠ヨ捣鍒颁綔鐢ㄦ毇鏅�(sh铆)鎬х辜绾�(x霉)宸ヤ綔銆�
鐖嗙牬鐗囪垏澶炬寔鍣ㄥ畨瑁濆湪娉曡槶涓枔锛屾硶铇拰澶炬寔鍣ㄤ箣闁撳彲浠ョ敤澧婄墖璧峰埌瀵嗗皝浣滅敤锛屽瀛� 鑸偤鍥涙盁鎴栬€呯传閵�锛岀垎鐮寸墖鑸囧ぞ鎸佸櫒涔嬮枔涓嶅厑瑷辨坊鍔犱换浣曞鐗�銆傚ぞ鎸佸櫒鍜岀垎鐮寸墖浣滅偤閰嶅瑁濈疆锛� 鑸ぇ浜�1鍏枻鐨勫鍔涘鍣ㄥ湪閰嶅倷鐖嗙牬鐗囦綔鐐烘硠澹撹缃檪(sh铆)閮介渶瑕侀厤澶炬寔鍣�锛屽ぞ鎸佸櫒 鑸潗璩�(zh矛)鐐虹⒊閶煎拰涓嶉姽閶�锛屽鏈夎厫铦曟€у彲閬告搰閫�(j矛n)鍙ｈ檿鐐哄洓姘熷ぞ鎸佸櫒锛屽嚭鍙ｈ檿鐐虹⒊閶兼垨涓嶉姽閶肩殑澶炬寔鍣紝婧害瓒呴亷260鈩冩檪(sh铆)锛屽ぞ鎸佸櫒鍙互鑰冩叜鍏朵粬閬╁悎浣跨敤宸ユ硜鐨勬潗璩�(zh矛)銆�
