伺服電機(jī)運(yùn)行時(shí)出現(xiàn)異常聲音或抖動(dòng)現(xiàn)象，如何處理?①伺服配線: a.使用標(biāo)準(zhǔn)動(dòng)力電纜，編碼器電纜，控制電纜，電纜有無破損; b.檢查控制線附近是否存在干擾源,是否與附近的大電流動(dòng)力電纜互相平行或相隔太近; c.檢查接地端子電位是否有發(fā)生變動(dòng)，切實(shí)保證接地良好。② 伺服參數(shù): a.伺服增益設(shè)置太大，建議用手動(dòng)或自動(dòng)方式重新調(diào)整伺服參數(shù); b.確認(rèn)速度反饋濾波器時(shí)間常數(shù)的設(shè)置，初始值為 0，可嘗試設(shè)置值; c.電子齒輪比設(shè)置太大，建議恢復(fù)到出廠設(shè)置: d.伺服系統(tǒng)和機(jī)械系統(tǒng)的共振，嘗試調(diào)整陷波濾波器頻率以及幅值。③機(jī)械系統(tǒng): a.連接電機(jī)軸和設(shè)備系統(tǒng)的聯(lián)軸器發(fā)生偏移，安裝螺釘未擰緊: b.滑輪或齒輪的咬合不良也會(huì)導(dǎo)致負(fù)載轉(zhuǎn)矩變動(dòng)，嘗試空載運(yùn)行，如果空載運(yùn)行時(shí)正常則檢查機(jī)械系統(tǒng)的結(jié)合部分是否有異常 c.確認(rèn)負(fù)載慣量，力矩以及轉(zhuǎn)速是否過大，嘗試空載運(yùn)行，如果空載運(yùn)行正常，則減輕負(fù)載或更換更大容量的驅(qū)動(dòng)器和電機(jī)。APPLIED MATERIALS 3700-01056 O-RING VIT 7.734 ID X.139
APPLIED MATERIALS 3700-01059 O-RING
APPLIED MATERIALS 3700-01061 O-RING
APPLIED MATERIALS 3700-01068 O-RING, VITON (ID.987, COLDSIDE .103) (Process CHAMBER ASSY)
APPLIED MATERIALS 3700-01069 O-RING, VITON 1.925IDX. 103 (PACK OF 10)
APPLIED MATERIALS 3700-01069 O-RING, VITON ID1.9
APPLIED MATERIALS 3700-01071 O-RING, 2-231GATE VALVE, ACTUATOR
APPLIED MATERIALS 3700-01072 O-RING, VITON, ID 5.734, COLDSIDE .139
APPLIED MATERIALS 3700-01073 O-RING (PACK OF 10)
APPLIED MATERIALS 3700-01078 O-Ring, Viton (ID 1.10, Coldside .210) (Process Chamber Assy)
APPLIED MATERIALS 3700-01082 O-RING, .109 ID .139 CSD VITON, PARKER 2-235, BELL JAR OPERATOR
APPLIED MATERIALS 3700-01083 O-RING .799 X .103 (PACK of 10)
APPLIED MATERIALS 3700-01086 NW-16-CR-SV KF 16 SEAL CENTERING RINGS
APPLIED MATERIALS 3700-01087 SEAL, ORING NW40 W/VITON SST KF-40
APPLIED MATERIALS 3700-01088 CENTERING RING (PACK OF 10)
APPLIED MATERIALS 3700-01093* O RINGORING ID 1.049 CSD .103 VITON 75DURO BLK
APPLIED MATERIALS 3700-01094 O-RING, VITON, ID .362, COLDSIDE .103, THROTTLE VALVE (PACK OF 1
APPLIED MATERIALS 3700-01096 O RING VIT 4.109IDX.139
APPLIED MATERIALS 3700-01097 O-RING,VITON,ID .484, COLDSIDE .139,CHAMBER SLIT VALVE (PACK OF
APPLIED MATERIALS 3700-01102 O RING E-P 1.740IDX.103 (PACK OF 10)
APPLIED MATERIALS 3700-01105 O-RING,8.897ID,80DUR (PACK OF 10)
APPLIED MATERIALS 3700-01119 O-RING, VITON, ID .737, COLDSIDE .103, ROBOT DRIVE ASSY(PACK OF
APPLIED MATERIALS 3700-01120 O-RING, LOAD VENT FEED
APPLIED MATERIALS 3700-01122 O-RING BELL JAR LASER VIEWPORT (PACK OF 10)
APPLIED MATERIALS 3700-01128 O RING VIT 2.300IDX.103
APPLIED MATERIALS 3700-01129* ORING ID 2.362 CSD .103 VITON 75DURO BLK
APPLIED MATERIALS 3700-01130 O-RING, 2-125 VITON (ID 1.299, COLDSIDE .103)
APPLIED MATERIALS 3700-01131 O-RING, VITON (ID 2.175, COLDSIDE .103) (THROTTLE VALVE)(PACK OF
APPLIED MATERIALS 3700-01132 O-RING
APPLIED MATERIALS 3700-01135 O RING
APPLIED MATERIALS 3700-01141 O-RING, 15.955 ID, .210 CSD, V
APPLIED MATERIALS 3700-01147 O-RING, DI RESISTIVITY SENSOR
APPLIED MATERIALS 3700-01149 O-RING
APPLIED MATERIALS 3700-01161 GASKET SEAL
APPLIED MATERIALS 3700-01162 O-RING, 2-015 VITON, ID .551, COLDSIDE .070, V747-75, CHAMBER PU
APPLIED MATERIALS 3700-01163 O-RING, VITON (ID .114, COLDSIDE .070) 75 DURO (THROTTLE VALVE A
APPLIED MATERIALS 3700-01171 O-RING, 5.725 ID, .275 CSD, LO
APPLIED MATERIALS 3700-01174 O-RING (PACK OF 10)
APPLIED MATERIALS 3700-01174* ORING ID 1.174 CSD103VIT
APPLIED MATERIALS 3700-01193 O-RING, 2-262 VITON
APPLIED MATERIALS 3700-01203 O-RING, VITON ID.296 CSD.139 (PACK of 10)
APPLIED MATERIALS 3700-01205 O-RING VITON DURO (LOADLOCK CHAMBER)
APPLIED MATERIALS 3700-01206 O-Ring Viton (ID 2.114 Coldside .070) 75 Duro (Process Chamber)
APPLIED MATERIALS 3700-01207 O-RING
APPLIED MATERIALS 3700-01209 O-RING VITON (ID 9.234, COLDSIDE .139) (LOADLOCK CHAMBER COVER)
APPLIED MATERIALS 3700-01213 O-RING
APPLIED MATERIALS 3700-01215* O RING ID.143 CSD.103
APPLIED MATERIALS 3700-01225 O-RING 2-226 VITON, ID 1.984, COLDSIDE .139 (PACK OF 10)
APPLIED MATERIALS 3700-01226* ORING ID 2.359 CSD .139 VITON 75 DURO B
APPLIED MATERIALS 3700-01229 O-RING, VITON (ID 1.609, COLDSIDE .139) (LOADLOCK CHAMBER ASSY.)
APPLIED MATERIALS 3700-01232 O RING
APPLIED MATERIALS 3700-01240 SEAL CENTER RING FOR TURBO
APPLIED MATERIALS 3700-01258 O-RING, I.D. 1.989, CSD .07, V (PACK OF 10)
APPLIED MATERIALS 3700-01260 ORING ID 1.614 CSD .070 VITON
APPLIED MATERIALS 3700-01267 O-RING,GAS FEED THRU (PACK OF 10)
APPLIED MATERIALS 3700-01267* O-RING ID .359 VITON
APPLIED MATERIALS 3700-01280 ORING ID 2.675 CSD .103 CHEMRAZ 80DURO W
APPLIED MATERIALS 3700-01285 O-RING,SILICONE,2.734 ID X .13 (PACK OF 10)
APPLIED MATERIALS 3700-01285* O-RING ID 2.734 CSD
APPLIED MATERIALS 3700-01288 SEAL, CAJON NI4VCR2GRVS (PACK OF 10)
APPLIED MATERIALS 3700-01301 O-RING, SLIT VALVE, KALREZ
APPLIED MATERIALS 3700-01308 O-RING
APPLIED MATERIALS 3700-01309 O-RING, KAL PLASMA TUBE
APPLIED MATERIALS 3700-01318 O-RING, ID 10.975 CSD .210 VITON 75
APPLIED MATERIALS 3700-01327 O-RING HOUSING
APPLIED MATERIALS 3700-01328 O-RING 15.620 ID 0.136 CSD
APPLIED MATERIALS 3700-01339 O-RING
APPLIED MATERIALS 3700-01342 ORING ID.484X.138W VITON V884-75 BROWN
APPLIED MATERIALS 3700-01344 O-RING
APPLIED MATERIALS 3700-01346 O RING ID 9.984X.139W VITON V884-75 BROW
APPLIED MATERIALS 3700-01347 O-RING ID 3.609 CSD .139 VITON
APPLIED MATERIALS 3700-01348 SEAL, 9.234 X .139 VITON (PACK OF 10)
APPLIED MATERIALS 3700-01349 O-RING, SILICONE, 1.359 X .139 (PACK OF 10)
APPLIED MATERIALS 3700-01351 SEAL CTR RING ASSY
APPLIED MATERIALS 3700-01359 O-Ring
APPLIED MATERIALS 3700-01372 O-RING (PACK OF 10)
APPLIED MATERIALS 3700-01377 O-RING
APPLIED MATERIALS 3700-01381 O-RING
APPLIED MATERIALS 3700-01382 O RING ID 16.455 CS .275 MS-004 VITON 60 DURO
APPLIED MATERIALS 3700-01387 O-RING 2-169, SILICON ORANGE
APPLIED MATERIALS 3700-01390 SEAL METAL BONNET
APPLIED MATERIALS 3700-01395 O-RINGS
APPLIED MATERIALS 3700-01401 O-RING
APPLIED MATERIALS 3700-01407 SEAL CTRG RING ASSY NM- 25 SST
APPLIED MATERIALS 3700-01414 O-RING,VITON,INNR XFR/BUFF (PACK OF 10)
APPLIED MATERIALS 3700-01416 O-RING
APPLIED MATERIALS 3700-01417 SEAL
APPLIED MATERIALS 3700-01423 O-RING ID 3.109 CSD 0.139 VITON
APPLIED MATERIALS 3700-01426 O-RING,VITON,XFR/BUFF,BROWN
APPLIED MATERIALS 3700-01429 O-RING
APPLIED MATERIALS 3700-01438 O-RING
APPLIED MATERIALS 3700-01440 O-RING
APPLIED MATERIALS 3700-01442 O-RING
APPLIED MATERIALS 3700-01477 O-RING, VITON ID10.484 CSD.139
APPLIED MATERIALS 3700-01478 O RING ID 1.737 CSD .103 VIT 75 DURO
APPLIED MATERIALS 3700-01486 O-RING, 3.859 X .139, 2-241, TFE, WHT
APPLIED MATERIALS 3700-01491 SEAL SHAFT LIP WAFER LIFT / SUSC
APPLIED MATERIALS 3700-01492 SEAL SHAFT LIP ROTATION/WAFER
APPLIED MATERIALS 3700-01494 O-RING, KALREZ (1.562 X 1.75 X
APPLIED MATERIALS 3700-01503 O-RING
APPLIED MATERIALS 3700-01506 O-RING
APPLIED MATERIALS 3700-01508 O-RING
APPLIED MATERIALS 3700-01509 O-RING
APPLIED MATERIALS 3700-01510 O-RING (2-458V80WHITE)
APPLIED MATERIALS 3700-01512 O-RING ID.239 CSD.70 VITON
APPLIED MATERIALS 3700-01513 O-RING,2-278V75DURO,BROWN
APPLIED MATERIALS 3700-01515 SEAL 1/8 FLANGE
APPLIED MATERIALS 3700-01516 SEAL 1/8 FLANGELESS
APPLIED MATERIALS 3700-01531 O-RING
APPLIED MATERIALS 3700-01534 O-RING, CHEMRAZ VCO
APPLIED MATERIALS 3700-01535 O-RING, CHEMRAZ
APPLIED MATERIALS 3700-01537 O-RING
APPLIED MATERIALS 3700-01538 O-RING-KALREZ 254K
APPLIED MATERIALS 3700-01543 O-RING SEAL CENTERING KF-25
APPLIED MATERIALS 3700-01543 O-RING SEAL CENTERING KF-25
APPLIED MATERIALS 3700-01544 O-RING
APPLIED MATERIALS 3700-01545 ORING ID 2.484X.139 VITON 75 DURO BRN
APPLIED MATERIALS 3700-01546 O-RING
APPLIED MATERIALS 3700-01559 ORING ID 1.820CSD .207 70DURO
APPLIED MATERIALS 3700-01565 O-RING
APPLIED MATERIALS 3700-01570 O-RING POINT WINDOW
APPLIED MATERIALS 3700-01578 O-RING, I.D. .484, CSD .139, K
APPLIED MATERIALS 3700-01593 O-RING,SILICON, ID 1.734, CSD.
APPLIED MATERIALS 3700-01595 O-RING,SILICON,STRIP CHAMBER ID 15.955 CSD .139
APPLIED MATERIALS 3700-01597 O-RING,SILICON, ID 2.112, CSD (PACK OF 10)
APPLIED MATERIALS 3700-01597* O RING ID 2.112 CSD .103 SILICONE
APPLIED MATERIALS 3700-01604 O-RINGS
APPLIED MATERIALS 3700-01610 SEAL STD HLCL LIP 3IN ID
APPLIED MATERIALS 3700-01619 O-RING, 1.734X.139 KALREZ
APPLIED MATERIALS 3700-01620 O-RING, ID.424, CSD.103, .625O,GAS FEED THRU (PACK OF 10)
APPLIED MATERIALS 3700-01621 O-RING
APPLIED MATERIALS 3700-01622 O-RING ID .612 CSD VITON
APPLIED MATERIALS 3700-01625 ASP,FEEDTHRU,BOTTOM,O-RING
APPLIED MATERIALS 3700-01626 RING, CENTERING KF5
APPLIED MATERIALS 3700-01629 SEAL LIP FLANGELESS 1/8 FLUOROLOY K T
APPLIED MATERIALS 3700-01637 O-RING
APPLIED MATERIALS 3700-01639 O-RING
APPLIED MATERIALS 3700-01640 O-RING
APPLIED MATERIALS 3700-01643 O-RING, 8.475 X .275
APPLIED MATERIALS 3700-01646 ASP BLANKOFF O-RING PUMP, PLAT
APPLIED MATERIALS 3700-01656 O-RING, .114 ID X .070 CX IN, (AS-568A-006)CHEMRAZ
APPLIED MATERIALS 3700-01658 O-RING, .426 ID .02 CSD
APPLIED MATERIALS 3700-01659 O-RING, 1.299 X .103 CHEMRAZ
APPLIED MATERIALS 3700-01660 ORING ID 1.359 CSD .139 (AS-568A-220)
APPLIED MATERIALS 3700-01661 O-RING
APPLIED MATERIALS 3700-01663 ORING ID 2.364 CSD .070 CHEMRAZ 80 DURO (AS-568A-036)
APPLIED MATERIALS 3700-01666 O-RING,WHITE
APPLIED MATERIALS 3700-01669 O-RING 2-346 104.14 MM ID 5.33 MM THICK
APPLIED MATERIALS 3700-01672 ORING ID 7.484 CSD.139 KALREZ 79DURO WHT
APPLIED MATERIALS 3700-01674 O-RING,WHITE
APPLIED MATERIALS 3700-01675 O-RING,HTD T/V SHAFT
APPLIED MATERIALS 3700-01676 2-249 2037 KALRAZ
APPLIED MATERIALS 3700-01679 ORING
APPLIED MATERIALS 3700-01681 ORING .301 CSD .070 KALREZ 79 DURO WHT
APPLIED MATERIALS 3700-01694 O-RING ID .114 CSD .07
APPLIED MATERIALS 3700-01696 O-RING ID 1.299 CSD.103 KALREZ 2037
APPLIED MATERIALS 3700-01698 O-RING KALREZ
APPLIED MATERIALS 3700-01703 AS-568A-346 O-RING KALREZ 2037
APPLIED MATERIALS 3700-01704 O Ring ID 1.100 CSD .210 KA
APPLIED MATERIALS 3700-01708 O-RING, CHEMRAZ
APPLIED MATERIALS 3700-01711 O-RING, 4.23 X .139
APPLIED MATERIALS 3700-01713 O-RING,1.100 ID X .210 CX IN, AS-568A-320(CHEMRAZ)
APPLIED MATERIALS 3700-01714 O-RING-2-326C-9326-SC513 CHEMRAZ
APPLIED MATERIALS 3700-01719 O-RING, 4.484 X .139 GATE VALV
APPLIED MATERIALS 3700-01720 O RING CHEMRAZ
APPLIED MATERIALS 3700-01726 O-RING,VITON
APPLIED MATERIALS 3700-01728 O-RING, KALREZ ID.725CSD.210 2037 80DURO
APPLIED MATERIALS 3700-01729 O-RING WHITE CHEMRAZ SS513 -314
APPLIED MATERIALS 3700-01730 ORING ID .070 CSD .070 VITON 75 DURO BLK
APPLIED MATERIALS 3700-01742 O-RING WHITE CHEMRAZ SS513 -261
APPLIED MATERIALS 3700-01746 O-RING ID 2.114 CSD .070 C
APPLIED MATERIALS 3700-01747 ORING ID.989CSD.07 FFKM (CHEMRAZ 513)
APPLIED MATERIALS 3700-01755 O-RING, ID .359CSD .139FFKM (CHEMRAZ 513)
APPLIED MATERIALS 3700-01756 O-RING, AS-568A-202 CPD 513 CHEMRAZ
APPLIED MATERIALS 3700-01758 O-RING CUD
APPLIED MATERIALS 3700-01781 O-RING,ID .299 CSD .103 AAC
APPLIED MATERIALS 3700-01783 O-RING, CHAMBER ISO VALVE, CHEMRAZ, PRODUCER
APPLIED MATERIALS 3700-01791 O-RING, KALREZ K#006
APPLIED MATERIALS 3700-01796 O-RING ID .424 CSD 103 (REPLACES 3700-01442)
APPLIED MATERIALS 3700-01799 ORING ID 1.112 CSD .103 KALREZ 4079 75DURO BLK
APPLIED MATERIALS 3700-01805 O-RING ID .796 CSD 139F
APPLIED MATERIALS 3700-01807 O-RING, AS-568A-226,KALREZ
APPLIED MATERIALS 3700-01812 O-RING
APPLIED MATERIALS 3700-01818 O-RING
APPLIED MATERIALS 3700-01822 KIT SEALS FOR LEYBOLD TMP PUMPS MODEL 34
APPLIED MATERIALS 3700-01831 O-RING, 4.23 X .139 GATE VALVE
APPLIED MATERIALS 3700-01833 O-RING ID 4.234CSD .13D CHEMRAZ
APPLIED MATERIALS 3700-01837 O-RING ID 4.1
APPLIED MATERIALS 3700-01837 O-RING ID 4.1
APPLIED MATERIALS 3700-01844 O RING CHEMRAZ (9242-SC513)
APPLIED MATERIALS 3700-01845 ORING ID .549 CSD .103 CHEMRAZ SC520
APPLIED MATERIALS 3700-01852 O-RING, VITON ID 549
APPLIED MATERIALS 3700-01855 O RING CHEMRAZ (9238-SC513)
APPLIED MATERIALS 3700-01857 O-RING (PACK OF 10)
APPLIED MATERIALS 3700-01858 SEAL , CTR RING ASSY
APPLIED MATERIALS 3700-01863 O-RING ID 1.23
APPLIED MATERIALS 3700-01864 SEAL CTR RING ASSY NW160 W/VITON
APPLIED MATERIALS 3700-01871 O-RING
APPLIED MATERIALS 3700-01872 O-RING ID 3.484 CSD.139 KA LREZ 2037 80
APPLIED MATERIALS 3700-01879 O-RING
APPLIED MATERIALS 3700-01881 O-RING
APPLIED MATERIALS 3700-01883 VOLTAGE FEEDTHRU O-RING SMALL
APPLIED MATERIALS 3700-01890 O-RING, CHEMRAZ
APPLIED MATERIALS 3700-01895 0RING ID .487 CSD .103 KALREZ-4079 75-DU
APPLIED MATERIALS 3700-01899 SEAL LID CHMBR 12.788ODX 1212.500IDX.117
APPLIED MATERIALS 3700-01909 O-RING ID 11.097 CSD. KALRAZ 2037 WHT
APPLIED MATERIALS 3700-01910 ORING ID 11.375 CSD .103
APPLIED MATERIALS 3700-01927 O-RING
APPLIED MATERIALS 3700-01928 O-RING
