本公司專業(yè)銷售大型進口各種品牌DCS系統(tǒng)模塊備件：AB,ABB Advant OCS，ABB MOD 30/MODCELL，ABB MOD 300，ABB Bailey INFI 90，ABB Procontic，ABB Procontrol，H&B Contronic，Moore APACS，Moore Panel Controllers，Rosemount RS-3，Siemens Iskamatic，Siemens Simatic S5，Siemens Simatic C1，Yokogawa Centum XL，Yokogawa microXL，F(xiàn)OXBORO I/A，Westinghouse,Ovation,Honeywell QCS，Honeywell TDC系列，Honeywell S9000，HITACHI，Mitsubishi PLC，Motorola MVME，ALSTOM MVME,Other VME,TOSHIBA,HP,Yaskawa,FANUC等大型模組，有著充足的庫存，交貨期快，歡迎來電查詢。
廈門興銳達自動化設(shè)備有限公司
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手機：15359273780
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網(wǎng)址：http://www.dcs-robots.com
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Aera MFC TC FC-980C, SiH4 1 SLM with Calabration SHEET
Aera MFC TC FC-980C, MULTI, MULTI-1
Aera MFC TC FC-980C, BCL3,100 SCCM
Aera MFC, 10 RA FC-980C, SiH4, 20 SCCM
Aera MFC FC-770AC Ar 200 SCCM
Aera MFC FC-770AC, N2 200 SCCM
Aera MFC, TC FC-980 PH3/He 500 SCCM 800PPM
UNIT 1660 UFC-1660 He 10 SLPM with calabration sheet
OMEGA CN371-KC2, NEW
NUPRO 6LV-BNBW4-O with VCR connection
Flow Meter and Pressure gauge, Norgren polycarbonate
New MRC AlCu Target from Williams Advanced Materials
MKS 109070028CE, Vacuum gauge, New
Reliance Conductor Small D-C motors
AE RFPP LF-5 RF Generator and RFPP ATL-100RA RF Match
9 New Schneider Electric Circuit breaker 20A
N-48 KEYENCE TERMINATOR 0106043 lots of 3
7 New AMAT 0680-02000, CB MAG Therm, 1P
BELKIN OMNI VIEW FCKG240354 QG
2 Applied Materials 0680-00323
Schneider Electric Circuit Breaker 25A lots of 7
Schneider Electric Circuit Breaker 10A lots of 13
Schneider Electric Circuit Breaker 30A lots of 7, New
SPI Shock Proof 24-344-4, step height measurement
2 New Arrow Hart 6612, locking plug, AMAT 0720-01203
FACTS Engineering T1F-16AD-2
2 New AMAT 1200-90079 Relay 24 VAC 10 AMP 4DPT
2 Applied materials 0680-01738
KEPCO Power supply RAX15-20K
AMAT 0680-00034, CB, New
KEPCO Power supply RAX48-3, 6K Lots of 3
Novellus Controller I/ 0 Daulcap Firmware Version 4.8
STEC Inc MFT-20
AMAT 0100-76124 Digital I/O PCB. used, untested
Mykrolis CDL1102, 0-10 TORR lots of 2
MILLIPORE CDLD-21S06, 0-100 TORR
INFICON AG, LI-9496 Balzers, CDG100A, 100 TORR
Vacuum general pressure transducer CML-21, 100 TORR
Comdel CLF-5000 RF Generator, Novellus 27-10140-00,
ENI Genesis GW5002MA-F1H131?-A3 3000W RF Generator W/Cal
Veeco XRF-2000AT X-Ray Measurement System
Granville-Phill?ips 275 MINI-convectron lots of 3 used
MYKROLIS intelli flow 3XP, N2 1000SCCM lots of 2 used
MYKROLIS intelli flow 3XP, NF3 5000 SCCM used
MYKROLIS intelli flow 3XP, N2, 5000 SCCM lots of 3 used
MYKROLIS intelli flow, O2, 10000 SCCM used
MILLIPORE 853011054001, 0-10 TORR, 0-10 VDC, used
EDWARDS Adjustable vacuum switch VS16K, 30-1000mBar
COMDEL LFMN 8/5, novellus P/N 27-296658-00
NOVELLUS ISIOC HI-LO Transfer 02-150755-00 REV.A
ISIOC Power supply, 02-125105-00, 27-053659-00 used
NOVELLUS Controller I/O DUALCAP 27-156710-00, REV.C
SMC NP420-DN1 VV5Q11-ULB00004?7
SMC NP420-DN1 VV5Q11-ULB98018?0
Wasp Bar Code Quick Scan 6000, used
TEMP CONTROLLER INR-244-402 WITH Omron BU SO4X
Beckman BM84546, Model# 451
Fiber Optic Illuminator 190, Dolan-Jenner Indust B848
Pfeiffer Balzers TPH 170 Turbo Pumps, PMP01210D619
Barber colman Model # 7SD491030000, OMRon K3N, Screen.
Richmond Static Control, Ionization Controller.
Charles water, static survayor
Optical fiber thermometer system model # 310
Inficon Quadrex Head selector, Model # 902-001-G1.
AMAT 0690-01037, HPS NW 50 Clamp, KF 50 clamp, New
Thornton resistivity sensor Lots of 2
ENI OEM-6 RF Generator, OEM-6AM-1, 13.56 MHz,used
ENI OEM-6 RF Generator, ENI OEM-6AM-1B-2125?1, 750 Watt
ENI OEM-650A RF Generator, ENI OEM-6A-11491-52?, 750 W
AMAT 0680-01251 P/N KT3250T
STEC LSC- 8410B, Liquid Source Controller, Looks clean
HP 3335A SYNTHIESIZER / LEVEL GENERATOR
AMAT 0190-13407 AE PDX RF Generator 500W, 325-375 KHz
NEW EDWARDS KF40 TRAPPED C/RING VITON AMAT 3700-01983
MKS BARATRON 627B152TBC1B, 500 TORR, looks very clean
NEW MKS, HPS, ASSY,RING.CTR.S?CRN NW50
MKS BARATRON 624A21TBC, 20 TORR, CALIBRATION SHEET.
MKS BARATRON 627A12TBC, 100 TORR, CALIBRATION SHEET.
MKS BARATRON 122B-11993, 100 TORR, CALIBRATION SHEET.
NEW 1/4 VCR CAP, Parker 4FNV-SSR
MKS BARATRON 531A11TBEH3, 1.333 KPa
NEW SWAGELOK VCR FITTING, SS-4-VCR-CP
ENI OEM-12A-21041-5??1 RF Generator, 1250W at 13.56 MHz
4NEW FTG TBG PLUG 3/8T HEX SST AMAT 3300-03362
STEC 4400, MFC, Ar, 2 SLM, Calibration sheet.
Trazar Corp. RF Match AMU10E-2, REV.A, P/N 27-118072-00
TECHWARE PROCESS CONTROLLER TC 3P-DX, looks very clean.
MASS FLOW CONTROLLER 5877, He, 10 SCCM lots of 2 USED
UNIT MFC UFC-8165, 10L, Gas N2, NEW in box
STEC MFC SEC-4400, Ar, 1 SLM WITH CALABRATION.
TYLAN MFC FC-270 SIH2CL2
STEC MFC SEC-4400M NH3, 1 SLM, With CALABRATION SHEET
MKS LP2-40-AK-CLVS VACUUM ISOLATION VALVE, used
MFC Mykrolis FC-2902MEP5-T, 5 SLPM, Gas N2 NEW lot of 2
Huntigton VF-173-5 Bellow, used
MFC Mykrolis FC-2902MEP5-T, 5 SLPM, Gas N2 NEW
MDC Isolation valve, Edward Isolation valve, used
Brooks model 5815C2G1A gas flow controller, used
MKS BARATRON 627B12TEC1B, 100 TORR, looks clean
MKS BARATRON 628B13TBE1B, 1000 TORR, CALABRATION SHEET.
MKS BARATRON 628B13TBE1B, 1000 TORR, very clean.
MKS BARATRON 629B13TBCJ1B, 1000 TORR, very clean
MKS BARATRON 122BA-00100EB, 100 TORR
EDWARDS DP80 Dry Vacuum Pump, used, as is
MKS BARATRON 122BA-01000EB, 1000 TORR, 0-10 VDC OUTPUT
ADVANCED ENERGY MDX-10K and MDX-20K, lots of 16, used
ADVANCED ENERGY DC Power Supply lots of 10, used, a
ADVANCED ENERGY MDX DC power supply, lots of 7
UNIT UFC - 7000 industrial MFC, H2, 1.00 SLM, NEW
MILLIPORE FC-2902MEP-T, SIH4, 1.5 SLMP NEW
Pump baldor VM3541 3/4HP & pump Head, looks clean
MILLIPORE IntelliFlow, N2 and SIH4 Used lots of 2
MKS baratron 128AA, 1000 torr, +/- 15 VDC, used as is
Mykrolis IntelliFlow DEVICE NET, N2, 10000 SCCM, used
MKS baratron 141AA, 10 torr, +24 VDC, used as is
MKS baratron 128AA, 10 Torr, +/- 15 VDC, used as is
MKS baratron 128AA, 1 Torr, +/- 15 VDC, used as is
MKS baratron 227AA, 1 TORR, +/- 15 VDC, used as is
MKS baratron 128AA, 10 TORR, +/- 15 VDC, used as is
MKS baratron 141AA, 10 Torr, used as is
EXFO Acticure A4000, Spot curing system, see pictures
BOC EDWARDS interface module, U20000521 used
AMAT 0690-01037 MKS HPS KF 50 Clamps, NW 50 HINGED
lot of 5 Novellus 03-104557-00 interface cable
ENI OEM-12B-02 RF Generator, 1250W at 13.56 MHz, used
ENI OEM-12B-02 RF Generator, 1250W at 13.56 MHz, used
ENI OEM-12B-01 RF Generator, 1250W at 13.56 MHz, used
ENI OEM-12B-1 RF Generator, 1250W at 13.56 MHz, used
Vexta 2-Phase Driver UD2115A, Used
HP 5328A UNIVERSAL COUNTER
UNIT UFC-1660 CL2 200 SCCM and O2 50 SCCM, lots of 2
Self Balancing Ionizer SP4500 Auto-Ion, used
TYLAN 2900M series MFC lots of 3, and TN2900 MFC, USED
Orifice 25 Micron SS-4-VCR-2, Novellus 22-284951-00
MILLIPORE intelliFlow DEVICE NET, N2, 50 ,400, 200 SCCM
MILLIPORE intelliFlow DEVICE NET, AR, N2, 100 SCCM used
10 New NTE NTE5814 Si, Inductrial Rectifier, Axial Lead
Unit 8560 Series DeviceNet UFC-8565 O2 He Lot's of 8
Unit 9000 Series UFM-9660 He 6L Lot's of 3
4 Unit 8560 series UFC-8561C H2 HCL, AMAT 3030-12306
3 Unit 3000 Series DeviceNet UFC-3165, AMAT 3030-03330
COMDEL CLX-1250 RF Generator 1.75-2.15 MHz
COMDEL CLX-1250 2 MHz RF generator P/N FP1215R2
ENI GHW-12Z Genesis RF Generator 1250W, AMAT 0190-09832
Rorze Sensor Mate RS Model, looks New
Mechanical Cartridge Tester 120 Controller
Universal End Point, eP-8000 Interface
Micro 7000 Hi speed controller MCD112KIGI
Head/Disk Interference Detector 4702F
2 NEW AMAT 0680-01029 Circuit breaker 20A 3P
NEW AMAT 3870-90477 PNEUMATIC PILOT VALVE
2 NEW AMAT 0680-02021 CB SPCL 1P 10A D-CURVE DIN MTG
8 used Tylan FC-261 N2, H2, O2
New Vacuum Fitting Reducing Tee NW50, SST, lot's 3
18 used Tylan FC-260 MFC, H2, O2, HCl, Cl2, WF6
2 used Tylan FC-260 MFC, N2 100 SCCM, 4 SLPM
2 MFC Tylan FC-260, 20% HCL/N2 500 SCCM
3 Mass Flow Meter Tylan FM-360, Argon and Air, untested
New AMAT 0150-21622 EMO Jumper PLUG, CBL EBARA
CABLES TO GO FIREWIRE CABLE D1394PER2M6C6C
Flexable gas line, Swagelok L-7-1 321-4-X-12FDR, 16 in.
Engis Hyprez Autostirrer ASP115 & ASP230 Speed control
KOMATSU ELECTRONICS DW621 NEW IN BOX
Motion Engineering SA-NOV controller lot's of 2 used
AE ADVANCED ENERGY PLASMA 3151802-003 AMAT 0920-00124
AMAT HEAT EXCHANGER AMAT 0 ENDURA SYSTEM P544
Lot of 10, Helium Neon Laser JDS Uniphase, Hughes, etc
Moeller PKZMO-25, Motor-protectiv?e circuit breaker, new
AMAT 1350-00034, Phoenix Contact #MCR-S-10-/50-U?I-DCI
AMAT 3870-04440 Manual Valve, CKD valve MMGD-2OV-AT2-L1
AMAT 1400-00028 Sensor Photoelectric Narrow Beam 700mm
Vat Gate Valve, heater, 64248-XE52-1108?, Looks clean
Hastings Reference Tube DB-20
Hastings Reference Tube DB-20
Acculex DP-2002 Digital Panel Meter
APTech AP 1006SV 2PW MV4 MV4
2 Eye Pieces
3880-01072 Spare Part Misc, Washer Wave SPRG .4900D
828-36-003 Lot of 2 Pole PC, Outer, Short
Flexable gas line, Swagelok L-7-1 321-4-X-12FDR, 16 in.
PHD, 4475-19 ParentD30, 0180502-3-01 Actuator, Mini Rot
15-00567-00, Ceramic, TC
AMAT 0020-30329 SCREW 2-30056500-452
Flexable gas line, Swagelok VCR connection 38 Inches
MKS Foreline Heated Jacket, 2 Straight Line, 1 Elbow
Flexable gas line, 316 Swagelok VCR connection, 31 Inch
100001419 KIT, Bellows Assy, NW40
0020-31296 Screw, 6-32 X 1/2LG Alum Vented 7/64 hex
000-6295-45 MCC 94V Board
Amphenol 10368 17-1724-1
AMAT 3870-01165 Valve Quick Exhaust 2 Way 5-150 PSI
899-02-054 Non-Cooled D.S.S. Plate Inset
828-36-002 Pole Pc Outer Long, 828-36-017, 828-20-005
Swagelok BD Plan 20 / .4, 210/0
QTY 50 New AMAT 3690-01771 Screw 080x5/32
2 NEW Parker TRIPLELOK-SS, MALE Fitting,
ENI OEM-12B-07 RF Generator AMAT 0190-76048 calibrated
AMAT 0010-70264 & AMAT 0010-70149 HP Robot Driver
RGA AMETEK Dycore M100 P/S, M100FG equipment Monitor
2 Zygo KMS400 Inspection equipment, Objectives, stages
Orion Reticle Photomask Inspection with Aludra system
Applied Materials AMAT 0010-21751 Resonator, 300 mm
Novellus Match 02-282128-00, used
4 used AE Advanced Energy HFV 8000 RF Generator
LOT OF 4 AMAT 3691-01555 SCR CAP SKT HD1/4-20X7/8L TORX
NEW AE MDX-L6 POWER SUPPLY 3152343-000B, 0190-76190-001
PATLITE ST-T VOLT=120V AC BULB=140V 10W, USED
AMAT 3870-00408 VALVE PNEU AIR PILOTED 4 WAY W/SPRING
VENA ENGINEERING MOTOR CONTROLLER BOARD 3100-0009 REV B
275 convectron gauge granville-phill?ips 275100-1
PRECISION SENSORS DIV ABSOLUTE PRESSURE SWITCH E48W-H79
AMAT 3700-01985 SEAL CTR RING ASSY NW40 W/VITON ORING
TWO RF CABLE 0191598227 REV B, 430" long
AMAT 3700-01985 SEAL CTR RING ASSY NW40 W/VITON ORING
adaptec AHA-2940/2940U ASSY 916506-01 BOARD
AMAT 3700-01054 ORING ID 6.484 CSD .139 VITON75 DURO
adaptec AHA-2940U2B ASSY 1692306-02 BOARD
adaptec AHA-2940W/2940U?W ASSY 917306-40 BOARD
NEW, PARKER QUICK DISCONNECT CPI 6HB-Q6VY-SSS
NEW, AMAT 1350-01103 MKS BARATRON 852B61PCJ2GC
BOC Edwards Active Gauge AIM-PL-NW25
TALON CLAMP LARGE 3 PRON CLAMP
CLAMP, TWO PRONG CLAMP
TWO PRONG CLAMP AD-22T-00-X4-P(?10X10)
AMAT 1400-00028 SNSR PHOTOELECTRIC NARROW BEAM 700MM
3 New AMAT 0680-01368 CIRCUIT BREAKER 208 Volt 40 Amp
33 New AMAT 3880-01130 CURVED WASHER
AMAT 0680-01152 CB MAG IP 120VAC 5A LG DLY 1/4-2
AMAT 0680-01368 CB MAG 3P 120VAC 40A LONG DELAY
AMAT 0680-01152 Circuit Breaker 120VAC 5A DLY 1/4
12 AMAT 0020-18899 WASHER, NOZZLE, ULTIMA HDP CVD
AMAT 1270-03122 SMC SENSOR PRODUCTS PRESSURE SWITCH
Texas Microsystems Compeq PCB Board FAB 796-F 17425B
PCB Board OPTO22 LC4 001836L 94V-0, OPTO 22 EX2 001840D
Assy, Cable, Tilt, Right 260CB172-03
AMAT Gripper, Sensor, Arm 2 0090-77180
Belt, Drive, F8225 010-0010
Baffle, Lower, 4420, 233430546
Ring, Spacer, SS D123466
Plate, Baffle, Upper 715-011912-083
Hitachi High, Asher Reflector- Legacy 233106723
AMAT 0240-34336 Throttle Valve, AMAT 3700-02406 Oring
Malena, Flow, Switch 233128072
AMAT 3880-01085 Washer BLVL .3750D x .1901D
BOC Edwards Water Jet Kitall Mods 85 316SS
Assy, N/F, Controller Cable 23324465
Rear Upper Cross Piece 7580
Angled, Anode, Ring, Sleeve 500062645
AMAT 0015-00423-P1 Bulb, 150W Auxillary
Aligner up/down transmission #7458, 233435333
AMAT 0100-00975 STEPPER CONTROLLER PCB
AMAT 0100-76124 DIGITAL I/O BOARD, REV B
SVG STATION CPU BOARD 80166F2-01
Horiba Stec LF-310A-EVD TEPO 0.1g/min Liquid mass meter
9 Banner D12SN6FP Fiber Optic sensor switch
6 Banner D12SN6FP Fiber Optic sensor switch
Yashawa Servo Motor R02SA20D, AMAT # 1080-01129, New
Microscope objective sp 100X/1.25 oil
Microscope objective sp 100X/1.25 oil
Microscope objective 100/1.25 160/0.17
Microscope objective SP 100X/1.25 oil
Microscope objective 40/0.65 160/0.17
Microscope objective 100/1.25 oil 160/0.17
Microscope objective 40/0.65 160/0.17
Microscope objective PL 3.2x/0.06
Microscope objective SP 100X/1.25 oil
Comdel CPS500AS RF Generator, AMAT 0190-13320
Pfeiffer TCP 600 Turbo pump Controller
NEW FOCUS, AFOP MODEL GYCW-3 FIBER OPTIC Work Station
NEW FOCUS, AFOP MODEL GYCW-4 FIBER OPTIC Work Station
PRI PCB BM17756L01/E, 9950PRI
ATI Technologies 109-43200-10
American Megatrends Hyper Disk 795005990, E7952000.04
COMPAQ BOARD, ASSY 006047-001, P03560B25EIVNI
Irvine Optical Corp. U22BPL1 PCB
ProgramMation C198/-90, BM23995R, HPRI0031T-M, PRI
US Robotics 000840-06 33.6 ISA Internal Data/Fax Modem
STI 16831 PCB, 1683-01-0047, 2601800
109-19301-10 ISA Mach 64 Graphics Card
Kalex 656993-002, PB656982-002, Ethernet ISA RJ45
Swagelok 6LVV-DPVVR4-P-C?, NEW in the box, lots of 8
SWAGELOK 6LVV-DPFR4-P1-0?, lot's os 2, NEW
EG&G Current Sensitive amplifire Model 181
Newport Laser diode driver model 6530
US Robotics 005687-53 ISA Internal Modem Card
Pc PCNAU504 Adapter Isa
HAMAMATSU 56489 C6219
Thermolyne Type 10100 stirring hot plate SP10105B
MNEMONICS E1-100-10, SEMITOOL 4012-10 REV 1-0
AMAT VACUUM FORELINE AND FLANGE 0040-30354, lots of 4
MICROSCOPE OBJECTIVE 10/0.25 160/-
MICROSCOPE OBJECTIVE PLAN 10/0.25 160/0.17
MICROSCOPE OBJECTIVE 4/0.10 160/-
STEC LF-310A, TEPO 0.25 g/min Liquid Flow Controller
STEC LF-410A-EVD, TEPO 7.0 g/min Liquid Flow Controller
STEC Liquid flow controller, LF-410A, TEOS, 4.0g/min
STEC LF-410A-EVD, TEOS,10 g/min, liquid flow controller
STEC LF-410A-EVD, TEB 2.0 g/min, TiCl4 2.0g/min , LFC
BODINE ELECTRIC 42A3FEPM-E4 GEARMOTOR, 130 VOLTS, CLEAN
STEC LF-310A, TEPO,0.25 g/min, liquid flow controller
Tylan 2900 MFC FC-2900M, CF4, He, CF4, CL2, lot's of 4
Tylan 2900 MFC FC-2900M-EP, N2, 20 SLPM, lot's of 2
Tylan 2900 MFC FC-2900M-EP, O2, 20 SLPM, lot's of 2
Tylan 2950 MFC FC-2952M 4V metal, Co, CHF4, lot's of 2
GRANVILLE PHILLIPS, ION VACUUM GAUGE, type EXT-Y
MKS Spectra HPQ2, Microvion plus, Resist torr, lot's 3
MicroMaster WP6311-AAAA western pacific times corp
Vacuum Gauge controller MIG-052 ANELVA CORPORATION
ELECTRODE VOLTAGE METER CONTROLLER A13-57936-02
YAMABISHI ELECTRONIC POWER CONTROLLER YAPC-100-3.5
ANELVA CORPORATION ATC-46 SCHEMATIC H11-05299
RF MATCHING UNIT VSP-0971
BELLOWS CYLINDER 80*60STMV lot's of 2
MKS Throttle Valve 153-E, used
Tellabs 812572, 2572 64 ms T1 echo canceller, card
Digital Link DL030 MNGMNT, PCBA 300-01908-01
AMAT 0100-20009 System Stepper Distribution PCB,
AMAT 0150-12066 Signals Cable, Looks new
18 New AMAT# 3300-06439 FGT TBG PLUG 1/4T ONE-TOUCH
Auto-Vacuum Valve AVL AVC001, Vacuum gauge, used
MKS Baratron Pressure Switch 41A, 100 Torr, New
MKS Spectra vacuum controller LM59, lot's of 3
STEC MFC SEC-4400MC, N2 and O2 TOTAL of 5 units
OSRAM BPX61 PHOTODIODE, New, 1 Qty
ENI RF Generator OEM-12A, 1250W at 13.56 MHz
Bettcher Process Services Switch Panel, MODEL 985V4
Rinse Controller, Bettcher Process Services, MODEL 985D
ENI RF Generator LPG-6A , Low Frequency, used, as is
Light Source I 150, Looks new,
Advanced Energy AE 3155039-000A TCM
MATHESON GAS REGULATOR MODEL # 3818-580, USED
Leybold Vacuum ION GAUGE lot's of 3, used
AMAT 0150-16084 Chamber Interface Cable, Damaged
HUNTINGTON VACUUM VALVE PV-150-SF, used
Ultra Fab Technology UFT-46-3 Remote PCB, New
Ultra Fab Technology UFT-48-8 Controler, Looks New
Ultra Fab Technology UFT-620 Controller, Looks New
MILLIPORE CDLD 1112E, 0-10 TORR, Used
MILLIPORE CMHT-11S02 Pressure Manameter, Used
MILLIPORE CMH4M1112E, 0-100M TORR, 0-10 VDC OUTPUT USED
MILLIPORE CDLD1112E, 0-10 TORR, 0-10 VDC OUTPUT, used
MKS Baratron Pressure Switch 51A, 1000 Torr, Lot of 2
Rorze RC-204A axis control Generate Master, looks New
SYSMELEC HANDHELD ROBOT & AUTOMATION CONTROLLER NO 181
TYLAN GENERAL, MDVX-100B, motor driven throttle valve
EDWARDS D14641000 AIM-S-NW25, ACTIVE GAUGE
STS Multiplex ICP chamber, Plasma Source, good parts
Novellus Sequel HDP Speed chamber body
WILLIAMS advanced materials thin film products
UNIT UFC-1660 CL2 200 SCCM and O2 1 SLPM, lots of 2
HPS MKS insulator, heat blanket, KF40 flange
CTI-CRYOGENICS 8300 compressor, 8001 controller
CTI-CRYOGENICS 8300 compressor, 8004 controller
alcatel pump 2033, leybold D90A, leybold D30A, Vac pump
Olympus MDPlan 80 Microscope IC80 Lens 0.90/F=180
Leitz Wetzlar Microscope objective lens NPL 20X/0.35
Microscope Objective Lens SP 10X/0.25
Microscope Objective Lens SP 4X/0.1 0.17
Microscope Objective Lens SP 40X/0.65 0.17
Microscope Objective Lens SP 100X/1.25 OIL 0.17
LEITZ WETZLAR NPL 20X/0.40 LEITZ ICR 20X/0.40 P
OLYMPUS MDPLAN 80 0.90 F=180 Olympus IC 80
AMAT 0010-0 09416 Etch Chamber RF Match, Untested used
MFC Brooks 5866 N2 RT series, For Novellus gas box
MKS Baratron 627A01TBC, 1 TORR with connection valves
HORIBA CM-100 Digital Control Unit, Surplus
Edward 1800 Pressure Controller, Very Good Cond.
MKS Spectra HPQ2 and Spectra Vacuum Controller, RGA
Qualidyne 5V 150A Switching Power Supply 10099, Surplus
Edwards high vacuum 600AB, 10 TORR
ENI OEM-25A-21091-5?1 RF Generator, 2500 W, 13.56 MHz,
Sieger Gas detection DIGI-CAT and DIGI-CHEM with sensor
RFPP RF Generator ICP-20P Model# 8511139050, 2000 W
ENI DCG-200 DC Plasma Generator, AMAT 0190-08033
Comdel, CPS-500AS RF Power source, AMAT 0190-13320
Novellus Data Collection Breakout Box, 002-00283-000
MKS baratron pressure switch 51A, 10 Pa
KF 16 Centering Seal, Orifice 015 Novellus 02-134129-15
KF 16 Centering Seal, Orifice 021 Novellus 02-134129-21
KF 16 Centering Seal, Orifice 016 Novellus 02-134129-16
KF 16 Centering Seal, Orifice 031 Novellus 02-134129-31
KF 16 Centering Seal, Orifice 022 Novellus 02-134129-22
KF 16 Centering Seal, Orifice 035 Novellus 02-134129-35
KF 16 Centering Seal, Orifice 034 Novellus 02-134129-34
KF 16 Centering Seal, Orifice 030 Novellus 02-134129-30
KF 16 Centering Seal, Orifice 017 Novellus 02-134129-17
KF 16 Centering Seal, Orifice 018 Novellus 02-134129-18
KF 16 Centering Seal, Orifice 013 Novellus 02-134129-13
KF 16 Centering Seal, Orifice 028 Novellus 02-134129-28
MKS baratron 127AA-000010, 1 TORR
